본문바로가기
HOME
SITEMAP
CONTACT US
인사말
조직도
회사연혁
인증 및 특허
오시는 길
System
Module
Component
Coating Service
중고제품
공지사항
제품상담
C/S 신청
제품관련자료실
공정기술 및 논문자료실
플라즈마 관련자료실
업계동향
System
Vacuum Plasma Deposition System
PECVD System/High Temperature PECVD System
ICP-CVD System
DC/RF/Co Sputtering System
Etching System
대면적 ICP-RIE System
ICP-RIE System
RIE System
PE(CCP)-RIE System
Ashing System
대면적 PE(CCP)-Ashing System
PE(CCP)-Ashing System
Vacuum / ATM(상압)Plasma System
Vacuum Plasma Liquid Coating System
Vacuum Plasma Surface Treatment System
ATM(상압) Plasma Surface Treatment System
Module
Module for Plasma Generation
Sub-module for Vacuum or Plasma Generation
Component
Components 1 (Angle Valve, Vacuum Accessory)
Components 2 (Vacuum Pump, Vacuum Gauge & Controller)
Components 3 (Mass Flow Controller, RF Generator & Matcher)
Coating Service
DLC (Diamond Like Carbon) Coating / Ar (Anti Reflection) Coating
중고제품
HOME
>
제품소개
>
System
>
Vacuum Plasma Deposition System
>
DC/RF/Co Sputtering System