Substrate size : Wafer 4 inch 부터~

Substrate rotation

Substrate temperature: Max. 400℃

Turbo & Rotary pump 조합

Ion & Convection gauge 조합

Mass Flow Control: Selection

RF power: Selection applicable

DC power: Selection applicable

Target size: Selection applicable

Automatic process controller

Interlock function for system safety

=> 최저가로 판매를 하고 있습니다.

=> 언제든지 연락주세요!